Miniature silicon condenser microphone
US5870482A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 25, 1997 |
| Grant date | Feb 9, 1999 |
| Priority date | — |
| Expiry date | Feb 25, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R31/006
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Multiple embodiments of a solid state condenser transducer, and methods of manufacture, are disclosed. The transducer comprises a semi-conductor substrate forming a frame and having an opening, a thin-film cantilever structure forming a diaphragm extending over a portion of the opening, the structure having a proximal portion and a distal portion. The proximal portion is attached to the frame, and the distal portion extends over a portion of the frame. A variable gap capacitor having a movable plate and a fixed plate is provided, wherein the movable plate is disposed on the distal portion of the structure and the fixed plate is disposed on the frame adjacent the movable plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.