Thermal transpiration driven vacuum pump
US5871336A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 25, 1996 |
| Grant date | Feb 16, 1999 |
| Priority date | — |
| Expiry date | Jul 25, 2016 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B37/06
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A micro-machined vacuum pump is provided which may be utilized with microsensors. The pump in accordance with the present invention is preferably fabricated within a semiconductor substrate and utilizes thermal transpiration to provide compression. The pump has a plurality of flow chambers and a plurality of flow tubes to interconnect the flow chambers. The pump additionally includes means for creating a temperature differential between a first end and a second end of each flow tube to draw the gas therethrough. Drawing the gas through the flow tube increases the pressure within an adjacent flow chamber and induces a pumping action.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.