Bulk acoustic wave (BAW) filter having a top portion that includes a protective acoustic mirror
US5872493A · kind A · utility
202Cited by
38References
46Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 13, 1997 |
| Grant date | Feb 16, 1999 |
| Priority date | — |
| Expiry date | Mar 13, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/48227
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A Bulk Acoustic Wave (BAW) filter, comprising at least one resonator structure that is disposed over a substrate, and an acoustic mirror that is disposed over the resonator structure. The acoustic mirror includes a plurality of layers. The acoustic mirror substantially isolates acoustic vibrations produced by the resonator from reaching beyond an upper surface of the acoustic mirror. The acoustic mirror also prevents environmental contaminants from coming into contact with the resonator. Also disclosed are surface-mountable BAW components.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.