Regression calibrated spectroscopic rotating compensator ellipsometer system with photo array detector
US5872630A · kind A · utility
99Cited by
11References
43Claims
0Family size
Inventors
Key dates
| Filing date | Aug 15, 1997 |
| Grant date | Feb 16, 1999 |
| Priority date | — |
| Expiry date | Aug 15, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2003/2866
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Spectroscopic Rotating Compensator Material System Investigation System including a Photo Array for simultaneously detecting a Multiplicity of Wavelengths is disclosed. The Spectroscopic Rotating Compensator Material System Investigation System is calibrated by a Mathematical Regression based technique involving, where desirable, Parameterization of Calibration Parameters. Calibration is possible utilizing a single two dimensional Data Set obtained with the Spectroscopic Rotating Compensator Material System Investigation System in a "Material System present" or in a Straight-through" configuration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.