Wideband vibration sensor
US5874675A · kind A · utility
39Cited by
14References
34Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 20, 1997 |
| Grant date | Feb 23, 1999 |
| Priority date | — |
| Expiry date | Mar 20, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/124
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention relates to an apparatus for making highly sensitive measurements of acceleration. The vibration sensor includes the use of a movable gate field effect transistor to sense the motion of a cantilever beam with respect to its base, it also includes an actuator element formed by a pair of electrodes actuating electrostatically on the beam. A feedback control loop is also included for force balance operation resulting in a very wide dynamic range for the sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.