Method of and apparatus for microwave-plasma production
US5874705A · kind A · utility
43Cited by
8References
25Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 8, 1997 |
| Grant date | Feb 23, 1999 |
| Priority date | — |
| Expiry date | Apr 8, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32605
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microwave-plasma apparatus produces a plasma substantially at or above atmospheric pressure. A vessel contains gas substantially at or above atmospheric pressure and a plasma once initiated. Microwave energy is radiated into said vessel to produce a plasma therein. The plasma is initiated. The vessel is shaped to confine said plasma in a volume to prevent dissipation of said plasma once initiated, and the device for radiating microwave energy includes a power controller to control the power level of the microwave energy to sustain said plasma once initiated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.