Guided wave device and method of fabrication thereof
US5875276A · kind A · utility
6Cited by
33References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 30, 1997 |
| Grant date | Feb 23, 1999 |
| Priority date | — |
| Expiry date | Dec 30, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49982
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for diffusing titanium into a single-crystal lithium niobate substrate and guided wave devices produced therefrom provide improved mode match with coupled fibers. Preferably, the titanium diffusion occurs at a diffusion temperature for a time between about 8 hours and about 18 hours. Outdiffusion of lithium oxide is allowed to occur during titanium diffusion. The outdiffused region, typically at least about 25 .mu.m, is much deeper than the titanium diffusion depth, typically about 5-10 .mu.m.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.