Micropumps with fixed valves
US5876187A · kind A · utility
246Cited by
30References
43Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 9, 1995 |
| Grant date | Mar 2, 1999 |
| Priority date | — |
| Expiry date | Mar 9, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/2224
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Micropumps fabricated by micromachining techniques and employing fixed or no-moving-parts valves. As one aspect of the invention, a laser-assisted chemical etching technique is employed for providing smooth-walled, curved configuration necessary to obtain the desired flow characteristics of the valves that are used in conjunction with the micropump.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.