Process for making a mold for the manufacture of microlenses
US5876642A · kind A · utility
10Cited by
2References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 31, 1996 |
| Grant date | Mar 2, 1999 |
| Priority date | — |
| Expiry date | Jan 31, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B3/0056
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
Preferential etching techniques are used to form a mold which can then be used to mold a microlens array. A mask (4.sub.i) made of a material which is resistant to a chemical composition for etching the plate is formed on a substrate, so that the mask is in the form of a grid with generally polygonal meshes each centered over one of the desired cells. The sides of each cell of the mask has outgrowths (5.sub.j) extending towards the center of desired cells. The substrate is subjected to the etching composition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.