Refillable ampule and method re same
US5878793A · kind A · utility
26Cited by
25References
18Claims
0Family size
Inventors
Key dates
| Filing date | Mar 12, 1997 |
| Grant date | Mar 9, 1999 |
| Priority date | — |
| Expiry date | Mar 12, 2017 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF17C2260/025
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A highly reliable bulk chemical delivery system for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.