Leak detector with vacuum pumps and operating process for same
US5880357A · kind A · utility
5Cited by
5References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 12, 1997 |
| Grant date | Mar 9, 1999 |
| Priority date | — |
| Expiry date | May 12, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M3/202
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A leak detection device includes a high vacuum pump implemented as a friction vacuum pump with two further vacuum pumps operating against atmospheric pressure. The further vacuum pumps are dry-sealing pumps in order to avoid hydrocarbon contaminations in a region of a test sample or a test chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.