Micromachined device with enhanced dimensional control
US5880369A · kind A · utility
45Cited by
14References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 15, 1996 |
| Grant date | Mar 9, 1999 |
| Priority date | — |
| Expiry date | Mar 15, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0814
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromachined device is provided that establishes select dimensional relationships between micromachined structures to achieve correlation in dimensional variation among these structures. Such dimensional relationships are achieved through consistent spacing between desired operating structures and by adding new structures (i.e., dimensional control structures) which provide additional consistent spacing at desired locations within the micromachined device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.