Microcalorimeter x-ray detectors with x-ray lens
US5880467A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 5, 1997 |
| Grant date | Mar 9, 1999 |
| Priority date | — |
| Expiry date | Mar 5, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2561
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Spectroscopic materials analysis wherein a sample under test is bombarded by electrons in a scanning electron microscope to produce an x-ray emission collected over a large solid angle by a polycapillary lens and focused onto the surface of a microcalorimeter detector. The x-ray lens is used to increase the effective collection area of the microcalorimeter detector used in an x-ray spectrometer. By increasing the collection angle, the time period for x-ray collection is reduced and the detector can be located farther from the x-ray source. The x-ray lens is effective over a broad energy range of x-rays, thus providing compatibility with spectroscopic analysis. The microcalorimeter can be calibrated to compensate for any variations in the transmission efficiency of the x-ray lens.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.