Anodic aluminum oxide passive alignment structures
US5880525A · kind A · utility
9Cited by
3References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 27, 1995 |
| Grant date | Mar 9, 1999 |
| Priority date | — |
| Expiry date | Jan 27, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/4249
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A passive alignment structure for a substantially planar substrate, which is an anodic aluminum oxide structure having a vertical profile with respect to a horizontal surface of said substantially planar substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.