Diamond or diamond like carbon coated chemical sensors and a method of making same
US5880552A · kind A · utility
67Cited by
18References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 27, 1997 |
| Grant date | Mar 9, 1999 |
| Priority date | — |
| Expiry date | May 27, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A water vapor insensitive and corrosion resistant chemical or biochemical nsor device, including a transducer, coated with a protective coating of diamond or a diamond-like carbon, preferably by a pulsed laser deposition technique. The surface of the protective coating is coated with a chemoselective or bioselective absorption material or film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.