Deformable mirror
US5880896A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 5, 1997 |
| Grant date | Mar 9, 1999 |
| Priority date | — |
| Expiry date | Aug 5, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0825
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A deformable mirror including: a flexible member including a reflective surface for reflecting light incident thereupon; and a reference surface substrate including a support portion for supporting a peripheral portion of the flexible member, and a curved portion provided inside the support portion, the curved portion providing a space for allowing for the flexible member to be elastically deformed. A height of a central portion of the curved portion of the reference surface substrate is set to be equal to or less than a height of the support portion of the reference surface substrate. The flexible member is elastically deformed by being drawn toward the curved portion of the reference surface substrate, thereby giving a predetermined aberration to light incident upon the reflective surface of the flexible member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.