Method of producing a layer structure and the use of the method

US5882400A · kind A · utility

Assignee

• Forschungszentrum Jülich GmbH · DE

Inventors

• Stefanie Bauer · Straubing, DE
• Martin Fleuster · Aachen, DE
• Willi Zander · Aldenhoven, DE
• Jurgen Schubert · Dirmstein, DE
• Christoph Buchal · Jülich, DE

Key dates

• Filing date: May 10, 1996
• Grant date: Mar 16, 1999
• Expiry date: May 10, 2016

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B2006/1204
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The invention concerns a method of producing a surface layer structure by doping a matrix with metal ions. The aim of the invention is to provide a method of this kind in which the depth distribution of the metal ions in the substrate can be regulated, thus optimumizing the doping without incurring any of the disadvantages inherent in the prior art methods. This is achieved by first depositing matrix material on a suitable substrate by laser ablation in an atmosphere of oxygen, thus forming a on surface of the substrate a first layer a matrix material. Dopant is then deposited on the surface of the first layer, followed by more matrix material. The result is a uniform doping of the deposited matrix at a defined depth in the surface layer structure.