Removing contamination
US5882487A · kind A · utility
11Cited by
4References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 20, 1997 |
| Grant date | Mar 16, 1999 |
| Priority date | — |
| Expiry date | Mar 20, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21F9/005
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method of removing from the surface of an object a contaminating substance buried in an organic substance on the surface of the object, the method including directing a laser beam at the organic substance to cause chemical change of the organic material or direct removal of the organic material by laser generated chemical change.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.