Cleaning agent and cleaning process for harmful gas
US5882615A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 10, 1996 |
| Grant date | Mar 16, 1999 |
| Priority date | — |
| Expiry date | Jul 10, 2016 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2251/406
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
There are disclosed a cleaning agent for removing a fluorine-compound gas such as hydrogen fluoride, fluorine, tungsten hexafluoride, silicon tetrafluoride and boron trifluoride which agent comprises a molded article produced by using strontium hydroxide as a principal component, an organic binding agent as a molding agent and the hydroxide of an alkaline earth metal other than strontium as a molding aid; and a process for cleaning a harmful gas which comprises feeding a harmful gas containing a fluorine-compound gas into a column packed inside with the above cleaning agent to remove the fluorine-compound gas; and exhausting a gas substantially free from the fluorine-compound gas. The above cleaning agent is capable of removing the fluorine-compound gas in high efficiency without causing any danger, thereby making itself well suited to the cleaning of the gases exhausted, for example, from semiconductor manufacturing industries.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.