Patent · US Expired

Monitoring deposited pads

US5882720A · kind A · utility

23Cited by
4References
38Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 8, 1997
Grant dateMar 16, 1999
Priority date
Expiry dateAug 8, 2017

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH05K2203/163
  • WIPO fieldAudio-visual technology
  • WIPO sectorElectrical engineering

Abstract

Automatically monitoring pads of material deposited on a surface of a workpiece using an inspection system that senses a deposited pad of material and determines pad height values at a plurality of locations across the pad, and a shape classifier that receives the pad height values as inputs and outputs a plurality of three-dimensional shape attributes related to pad deposit conditions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.