Antireflective coating compositions
US5886102A · kind A · utility
144Cited by
6References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 11, 1996 |
| Grant date | Mar 23, 1999 |
| Priority date | — |
| Expiry date | Jun 11, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/091
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention provides new light absorbing crosslinking compositions suitable for use as an antireflective composition (ARC), particularly for deep UV applications. The ARCs of the invention in general comprise a crosslinker and novel ARC resin binders that effectively absorb reflected deep UV exposure radiation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.