Terpolymers containing organosilicon side chains

US5886119A · kind A · utility

Assignee

• Olin Microelectronic Chemicals, Inc. · US

Inventors

• Ulrich Schaedeli · Plasselb, CH
• Eric Tinguely · Fribourg, CH
• Manfred Hofmann · Hettstadt, DE
• Pasquale Alfred Falcigno · Yonkers, US
• Carl-Lorenz Mertesdorf · Wetzikon, CH

Key dates

• Filing date: Jul 16, 1996
• Grant date: Mar 23, 1999
• Expiry date: Jul 16, 2016

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/0045
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A terpolymer containing 20 to 70 mole percent of an acid labile repeating unit, 3 to 40 mole percent of an acrylic acid or acrylonitrile based repeating unit and a repeating unit containing silicon side chains. The silicon side chain repeating unit is provided in sufficient amounts so that the terpolymer silicon content is 7 to 20 weight percent. The terpolymer is used primarily in the formulation of multilayer positive operating photoresists.