Patent · US Expired

Microelectronic integrated sensor and method for producing the sensor

US5886261A · kind A · utility

5Cited by

4References

6Claims

0Family size

Assignee

Siemens Aktiengesellschaft · DE

Inventors

Karlheinz Mueller · Friedrichshafen, DE
Stefan Kolb · Unterschleißheim, DE

Key dates

Filing date	Sep 30, 1996
Grant date	Mar 23, 1999
Priority date	—
Expiry date	Sep 30, 2016

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2203/053
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A microelectronic integrate sensor is formed with a cantilever. For the purpose of ensuring a system which is especially invulnerable to mechanical strains during production, the cantilever is placed freely movably on a support, and motion limiters are provided on the edge. The invention also provides for the formation of nitride pillars for supporting the upper layers, in order to further increase the stability. A corresponding production process for producing the sensor is disclosed as well.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.