Laser ablation with transmission matching for promoting energy coupling to a film stack
US5886320A · kind A · utility
35Cited by
11References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 3, 1996 |
| Grant date | Mar 23, 1999 |
| Priority date | — |
| Expiry date | Sep 3, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The amount of laser energy absorbed by a dielectric material during laser fuse blow is increased by changing the angle at which the laser is transmitted. An increased angle of incidence will result in increased energy absorption at the top and edge of the device. This technique may eliminate the need for second pass fuse blow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.