Thin film hydrogen sensor
US5886614A · kind A · utility
11Cited by
7References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 11, 1997 |
| Grant date | Mar 23, 1999 |
| Priority date | — |
| Expiry date | Apr 11, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thin film hydrogen sensor, includes: a substantially flat ceramic substrate with first and second planar sides and a first substrate end opposite a second substrate end; a thin film temperature responsive resistor on the first planar side of the substrate proximate to the first substrate end; a thin film hydrogen responsive metal resistor on the first planar side of the substrate proximate to the fist substrate end and proximate to the temperature responsive resistor; and a heater on the second planar side of the substrate proximate to the first end.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.