Method of fabricating plastic mask for paste printing with an excimer laser
US5887520A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 28, 1995 |
| Grant date | Mar 30, 1999 |
| Priority date | — |
| Expiry date | Dec 28, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31678
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A method of fabricating a plastic mask for paste printing with a plastic sheet being irradiated with an excimer laser beam for forming at least one penetrating opening container area including at least one through-hole in the plastic sheet is carried out by the steps of bringing a polymer film capable of absorbing at least part of the excimer laser beam into close contact with a back surface of the plastic sheet which is opposite to an excimer laser beam irradiation side thereof which is to be irradiated with the excimer laser beam; forming at least one penetrating opening containing area including at least one through-hole in the plastic sheet by irradiating the excimer laser beam irradiation side thereof with the excimer laser beam; and removing the polymer film from the plastic sheet after the formation of the penetrating opening containing area. By use of a plastic mask fabricated by the above method, a pasta printing is also carried out.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.