Ultraviolet irradiating device for photo-alignment process and an irradiating method using the same
US5889571A · kind A · utility
58Cited by
5References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 31, 1997 |
| Grant date | Mar 30, 1999 |
| Priority date | — |
| Expiry date | Jan 31, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/133788
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A photo-irradiating apparatus includes a UV lamp generating the UV light, a lens, a polarizer in which the UV light is linearly polarized, and a substrate exposed by the linearly polarized UV light. The UV lamp, the lens, and the polarizer are arranged in a line. The UV light is irradiated into the alignment layer during the moving of a scan motor to irradiate the whole area of the alignment layer uniformly. In addition, the light is obliquely irradiated into the alignment layer so that the area exposed to the light is enlarged.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.