Interferometric measurement of toric surfaces at grazing incidence
US5889591A · kind A · utility
7Cited by
9References
28Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 17, 1996 |
| Grant date | Mar 30, 1999 |
| Priority date | — |
| Expiry date | Oct 17, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/255
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Toric surfaces are mounted on a transparent support plate and measured at grazing incidence using a pair of leading and following diffractive optics for diffracting a test beam with respect to a reference beam. The leading diffractive optic diffracts rays of the test beam through various diffraction angles so that after passing through the transparent support plate, the rays strike the toric surface at a constant grazing angle. The following diffractive optic further diffracts the rays of the test beam through other diffraction angles into realignment with the reference beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.