Capacitive microphone and method therefor
US5889872A · kind A · utility
88Cited by
2References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 2, 1996 |
| Grant date | Mar 30, 1999 |
| Priority date | — |
| Expiry date | Jul 2, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R19/016
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A capacitive microphone (10) utilizes a polysilicon diaphragm (14) that overlies an atmospheric cavity (34). The diaphragm is doped and annealed to form a sensitivity of the microphone (10). A silicon cap covers and protects the diaphragm (14) and a fixed plate (18).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.