Patent · US Expired

Apparatus for and method of development processing

US5890028A · kind A · utility

4Cited by
1References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 22, 1997
Grant dateMar 30, 1999
Priority date
Expiry dateDec 22, 2017

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03D3/132
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A development processing apparatus includes: a plurality of stock tanks which stores a plurality of types of processing solutions; a small-volume single processing tank including an entrance/exit port for a film which enables the entering/exiting of the film, the processing tank accommodating the film via the entrance/exit port for a film and developing the film in the plurality of types of processing solutions; processing solution supply which supplies the plurality of types of processing solutions from the plurality of stock tanks to the processing tank in a predetermined order; a sensor which measures the temperature of the processing solution within the processing tank; a heater which is disposed at the stock tanks or the processing solution supply and heats the processing solution; and control which is connected to the processing solution supply and the heater and controls the processing solution supply such that the last processing solution supplied to the processing tank is filled within the processing tank even after the film is removed from the processing tank, and the control controlling the heater such that the temperature of the last processing solution is set to a pred…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.