Ozone enriched process gas
US5891344A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 12, 1996 |
| Grant date | Apr 6, 1999 |
| Priority date | — |
| Expiry date | Apr 12, 2016 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B13/10
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A flow control apparatus for enriching gas containing oxygen with ozone includes a generator for producing the enriched mixture. A flow meter is connected to the generator outlet to measure the flow of the generated enriched gas. A mass flow control device is connected downstream of the flow meter. A flow control comparator compares a flow value as obtained from the measuring means and a preset constant value. A signal output of the flow control comparator is connected to a signal input of the mass flow control device for varying the mass flow in accordance with the comparison. An outlet of the mass flow control device is connected to an inlet of a compressor for compressing gas, the inlet gas pressure varying to keep compressed gas at a constant pressure. Feedback is provided between an outlet and an inlet of the compressor. A second mass control device is intermediately connected along the feedback connection for adjusting the mass flow of gas passing through the feedback means. A pressure control comparator compares the inlet pressure of the compressor to a second preset constant value. A signal output of the pressure control device is connected to a signal input of the mass flo…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.