Velocity-matched traveling-wave electro-optical modulator using a benzocyclobutene buffer layer
US5895742A · kind A · utility
19Cited by
4References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 19, 1996 |
| Grant date | Apr 20, 1999 |
| Priority date | — |
| Expiry date | Jul 19, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2201/07
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for use in fabricating an electro-optic structure on a substrate having an optical waveguide formed in an upper surface thereof, comprises the steps of forming a layer of organic dielectric material, such as a benzocyclobutene (BCB) resin, on the substrate upper surface, forming an interface layer on an upper surface of the organic dielectric layer, and forming an electrically isolated electrode on an upper surface of the interface layer such that an electrical field can be induced in the optical waveguide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.