Semiconductor device using semiconductor BCN compounds
US5895938A · kind A · utility
17Cited by
1References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 12, 1997 |
| Grant date | Apr 20, 1999 |
| Priority date | — |
| Expiry date | Feb 12, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/547
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Disclosed is a semiconductor device comprising a semiconductor BCN compound layer and a metallic BCN compound layer and/or an insulating BCN compound layer, wherein the semiconductor BCN compound layer and the metallic BCN compound layer and/or insulating BCN compound layer are stacked one upon the other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.