Suspension fabricated from silicon
US5896246A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 21, 1997 |
| Grant date | Apr 20, 1999 |
| Priority date | — |
| Expiry date | Apr 21, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4903
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An apparatus comprising a magnetic head suspension assembly (10) comprised of a rectangular portion (12), load beam (14) and flexure (16) fabricated from a silicon structure using the etching techniques of the integrated circuit fabrication industry. The magnetic head suspension assembly (10) has electrical leads (23) to a slider, a pre-amp circuit (25) and a microactuator (27) fabricated directly thereon. A system of providing a loading force passing to slider (50) comprises either a tapered base plate (40) adapted to be held by a horizontally oriented actuator arm or an actuator arm (60) having at least one angled receiving surface (62,64) for attachment to said suspension assembly. The method of forming a magnetic head suspension assembly (10) from an etched silicon structure comprising a cutting step comprising cutting the silicon structure into the silhouette shape of a magnetic head suspension assembly, having a rectangular portion (12), a load beam (14) and a flexure (16), the flexure is cut in a shape such that finger members (18), slider bond tongue (19) and dimple tongue (20) appear thereon. Subsequent to the cutting step, photo-etching regions of the silicon structure re…
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