Patent · US Expired

Seal for vacuum devices and methods for making same

US5897927A · kind A · utility

45Cited by
13References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 30, 1997
Grant dateApr 27, 1999
Priority date
Expiry dateJun 30, 2017

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC03C27/042
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A method for permanently sealing an ultra-high vacuum within a glass enclosure. This is accomplished by first forming a hole, either in one of the flat plates that form the enclosure or in one of the standoffs that separate the plates, and then sealing a metal tube to the glass. In one embodiment, the metal tube is positioned so as to be partly inside the hole while in another a flange at the end of the tube is positioned to cover the hole. In both cases, a glass frit paste is then applied all around the glass metal interface. This is followed by heating so that the frit softens and becomes a glass-to-metal seal. Once the structure has cooled down the attached metal tube is used as a pumping port to evacuate it and, while still under vacuum, the metal tube is pinched off to form a permanent seal.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.