Device and method for three-dimensional measurements and observation in situ of a surface layer deposited on a thin-film stack
US5898500A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 21, 1997 |
| Grant date | Apr 27, 1999 |
| Priority date | — |
| Expiry date | Aug 21, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Device and method for three-dimensional measurements and observation of a surface layer of a thin-film structure, comprising a monitoring unit 4 which includes a video camera 12, a wide-beam illumination source 14, a narrow-beam illumination source, 20, an operation and control unit and a table for horizontal movement. The device comprises a Wollaston prism 24 arranged on the optical path of the narrow light beam, in order to obtain two narrow light beams whose polarization states are linear and mutually orthogonal, a polarizer 27 arranged on the optical axis of the Wollaston prism 24 so that the reflected narrow light beam passes through it after its travel through the Wollaston prism 24, and a detection cell 28.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.