Method for testing pressure sensors
US5900530A · kind A · utility
13Cited by
10References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 24, 1997 |
| Grant date | May 4, 1999 |
| Priority date | — |
| Expiry date | Nov 24, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L27/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Pressure sensors that are fabricated to sense low pressures are tested and calibrated by providing a controlled gas flow or leak to create a pressure during testing. Rather than placing the pressure sensor in a sealed environment, a controlled leak of a gas is used to induce a stable and controllable pressure region over the pressure sensor during testing. The stable low pressure region is monitored via a sensing tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.