Test gas leakage detector

US5900537A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventors

• Thomas Böhm · Zorneding, DE
• Rudi Widt · Recklinghausen, DE

Key dates

• Filing date: Jul 3, 1997
• Grant date: May 4, 1999
• Expiry date: Jul 3, 2017

Classification

• Technology area (CPC G): Physics
• CPC primary: G01M3/202
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A test gas leakage detection assembly (1) includes an inlet (2), a detector (3) in the form of a mass spectrometer, a first friction pump stage (5) which is driven in counter-flow, a second friction pump stage (7). The assembly further includes an intermediate connection (6) between the first and second friction pump stages, a pre-vacuum pump (8), a first connection line (13) which can be shut off between the leakage detector inlet (2) and the inlet side (9) of the pre-vacuum pump (8), and a second connection line (15) which can be shut off between the leakage detector inlet (2) and the intermediate connection (6). In order to detect leaks without using oil, the pre-vacuum pump (8) is a diaphragm pump. In order to shorten the response time, it is advantageous if the conductance of the second connection line (15) between the inlet (2) of the leakage detection assembly (1) and the intermediate inlet (6) is adjustable.