Buckled actuator with enhanced restoring force
US5901939A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 9, 1997 |
| Grant date | May 11, 1999 |
| Priority date | — |
| Expiry date | Oct 9, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S251/901
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An electrostatic actuator device including a stationary support and a buckled, moveable support mounted to enter into contact with the stationary support. At least three electrodes are employed. The first is mounted on the moveable support and a second electrode is on the stationary support. A third electrode is mounted on one of the supports such that the electrodes are positioned to form two pairs of electrodes for electrostatic attraction therebetween. The electrodes are powered by a voltage supply to provide electrostatic attraction between pairs of electrodes and move them into electrostatic contact. The buckled electrode has a shape configured to transmit a restoring force to its portion in contact with stationary support upon application of voltage to another pair of electrodes. The preferred voltage provides a two phase driving force including a voltage to the first pair of electrode for a period of time in a cycle of operation and a voltage to the second pair of electrodes for a period of time in the same cycle, preferably with an interim period of time with no voltage applied after each application of voltage. Various arrangements of three or more electrodes are disclosed…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.