Process for producing spatially patterned components

US5902120A · kind A · utility

Assignee

• Micronas Intermetall GmbH · DE

Inventors

• Guenter Igel · Teningen, DE
• Martin Mall · Glückstadt, DE

Key dates

• Filing date: Mar 13, 1998
• Grant date: May 11, 1999
• Expiry date: Mar 13, 2018

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2201/0173
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A process is disclosed for producing spatially patterned components from a body. On the backside of the body, a retardation layer with openings is provided for retarding a removal of the material of the body, and areas of migration-capable material are deposited. The body is subjected to a thermal migration process to form migration regions. Then, in a single material removal step, the components are separated from the body and the migration regions are exposed.