Micro-electromechanical (MEM) optical resonator and method
US5903380A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 1, 1997 |
| Grant date | May 11, 1999 |
| Priority date | — |
| Expiry date | May 1, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06K7/10653
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An integrated micro-electromechanical (MEM) optical resonator comprises a cantilever beam which is fixed to a substrate at one end and extends freely over the substrate at the other end, and a bimorph actuator stacked atop the beam at its fixed end. A reflective surface partially covers the top of the beam at its free end. The bimorph actuator comprises material layers having different thermal expansion coefficients. A DC-biased AC voltage connected across the actuator causes it to heat and cool as the current passing through it increases and decreases, creating a thermal bimorph effect which causes the cantilever beam and the reflective surface to oscillate in accordance with the varying current, preferably at the beam and actuator structure's fundamental resonant frequency. Combining the resonator with a light source and actuator excitation circuitry creates an optical scanner engine which delivers a scan angle in excess of 20 degrees and a scan rate of up to 2000 Hz, using a driving voltage of only 2 V.sub.p-p.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.