Free-standing rotational rod-fed source

US5905753A · kind A · utility

Assignee

• The BOC Group Limited · US

Inventors

• Russell J. Hill · Corona, US
• P. A. Joel Smith · San Pablo, US
• Ping Chang · Danville, US

Key dates

• Filing date: Jun 23, 1997
• Grant date: May 18, 1999
• Expiry date: Jun 23, 2017

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/246
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

In a rotational rod-fed electron-beam evaporation source used with sublimating rod material, the ingot rod can be free-standing with respect to the crucible. This means that the side of the ingot rod near the tip of the rod does not contact a cooling crucible. In this way, the system can be operated in a defocused position of the electron beam, and the sweep of the electron beam can go over the edge of the ingot rod tip. Using these features, a substantially radial sweep of the tip of an ingot rod that sweeps over the edge can produce a substantially flat evaporation pattern on the ingot rod, producing a good utilization of the expensive ingot rod material.