Cryopump with gas heated exhaust valve and method of warming surfaces of an exhaust valve
US5906102A · kind A · utility
9Cited by
13References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 12, 1996 |
| Grant date | May 25, 1999 |
| Priority date | — |
| Expiry date | Apr 12, 2016 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B37/08
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A cryopump having a cryopump chamber includes a purge gas valve coupled to the cryopump chamber for supplying a first quantity of warm gas to the cryopump chamber in order to purge the cryopump chamber during regeneration. A roughing valve couples the cryopump chamber to a roughing pump enabling the cryopump chamber to be roughed. An exhaust valve is coupled to the cryopump chamber for exhausting gases from the cryopump chamber during purge. A delivery valve is coupled to the exhaust valve for delivering a second quantity of warm gas directly onto surfaces of the exhaust valve for warming the surfaces of the exhaust valve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.