Patent · US Expired

Detecting fields with a two-pass, dual-amplitude-mode scanning force microscope

US5907096A · kind A · utility

19Cited by
9References
7Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJun 2, 1997
Grant dateMay 25, 1999
Priority date
Expiry dateJun 2, 2017

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/851
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A scanning probe microscope is used as an atomic force microscope during a first pass of a vibrating probe tip along a line extending along a sample surface, with data representing topographical features occurring along the line being stored. In a second pass along the line, the topographical data is used to allow movement of the vibrating probe tip with the center of vibration at a fixed distance above the sample surface, as the resulting amplitude or phase angle of probe vibration provides an indication of the level of a magnetic or electric field. In the second pass, the amplitude of probe tip vibrations is substantially less that the amplitude of such vibrations in the first pass, so that the probe operates out of contact with the sample surface, even if the center of such vibrations occurs at the same level during both passes, or if this center is brought closer to the sample surface during the second pass.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.