Liquid crystal display having an active matrix substrate with thermosetting inter-layer insulating film with a thickness of greater than 2 .mu.m
US5907376A · kind A · utility
21Cited by
6References
6Claims
0Family size
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Key dates
| Filing date | Mar 20, 1997 |
| Grant date | May 25, 1999 |
| Priority date | — |
| Expiry date | Mar 20, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/136227
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In the fabrication of an active matrix substrate, when forming a contact hole in an inter-layer insulating film made of a thermosetting resin and hardening the inter-layer insulating film by heat, the temperature gradient in raising the temperature from room temperature to a baking temperature is arranged to be larger than 10.degree. C./minute. As a result, the tilt angle of the slant face of the contact hole is controlled to be within a range of 45.degree. to 60.degree..
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.