Beam alignment correction element assembly
US5909323A · kind A · utility
9Cited by
13References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 29, 1996 |
| Grant date | Jun 1, 1999 |
| Priority date | — |
| Expiry date | Jul 29, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/646
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A correction element assembly for correcting misalignment of a beam of radiation with respect to a location on a target, includes a housing having a correction element fixedly mounted therein. A flexure is attached to the housing and at least two drive devices are disposed radially around the housing. Each of the drive devices is operable to apply a force to the housing to thereby deflect the flexure causing the housing to move such that said correction element moves in a cyclic fashion about its beam axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.