Electrostatic chuck member having an alumina-titania spray coated layer and a method of producing the same
US5909354A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 12, 1996 |
| Grant date | Jun 1, 1999 |
| Priority date | — |
| Expiry date | Aug 12, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An electrostatic chuck member includes a metal substrate, an undercoat of a metallic spray-coated layer and a topcoat of Al.sub.2 O.sub.3 TiO.sub.2 based spray-coated layer containing a Ti.sub.n O.sub.2n-1, where n=1-9, compound. The electrostatic chuck member has a large volume resistivity, a small scattering, and the quality is stable. A method for making the electrostatic chuck member includes subjecting a metal substrate to a blast treatment, spray-coating a metallic undercoat on a surface of the metal substrate, and spray-coating Al.sub.2 O.sub.3 TiO.sub.2 on to the metallic undercoat to form a Al.sub.2 O.sub.3 -TiO.sub.2 based layer in which at least a portion of the TiO.sub.2 is changed into Ti.sub.n O.sub.2, where n=1-9.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.