Method for manufacturing a diffraction type optical element
US5910256A · kind A · utility
15Cited by
7References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 13, 1997 |
| Grant date | Jun 8, 1999 |
| Priority date | — |
| Expiry date | Aug 13, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/1857
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
In a method for manufacturing a diffraction type optical element having an arbitrary cross-section, a laser beam of a single mode is divided into two and then is again focused on a thin film on a substrate, thereby obtaining a laser beam pattern changing periodically in intensity through interference thereof which is then irradiated onto the substrate while the substrate is positioned inclined with respect to a plane which is perpendicular to an average light beam axis of the two laser beams.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.