Integrated hybrid silicon-based micro-reflector
US5910856A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 16, 1998 |
| Grant date | Jun 8, 1999 |
| Priority date | — |
| Expiry date | Apr 16, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/085
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A light reflective device including an insulative substrate; a silicon wafer positioned over the insulative substrate and defining an opening and having a flexible beam portion having top and bottom surfaces which extend into the opening; a layer of ferromagnetic material formed over the top surface of the flexible beam portion; a reflector formed over the ferromagnetic layer on the top surface of the flexible beam portion; and a micro-electromagnet mounted on the insulative substrate relative to the opening of the silicon wafer and adapted to produce a magnetic field in response to an applied current which acts on the ferromagnetic layer to cause the bending of the flexible beam portion, ferromagnetic layer and reflector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.