Patent · US Expired

Carrier for a semiconductor wafer and use of the carrier

US5911461A · kind A · utility

31Cited by

9References

8Claims

0Family size

Assignee

Wacker Siltronic Gesellschaft Fur Halbleitermaterialien AG · DE

Inventors

Bernd Sauter · Emmerting, DE
Dieter Seifert · Vilshofen an der Donau, DE

Key dates

Filing date	Jun 24, 1997
Grant date	Jun 15, 1999
Priority date	—
Expiry date	Jun 24, 2017

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S414/141
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A carrier for a semiconductor wafer has at least three protrusions on which he edge of the semiconductor wafer is supported so that the semiconductor wafer is positioned essentially horizontal. The carrier does not make contact with the front side and the rear side of the semiconductor wafer. The protrusions are shaped so that the edge of the semiconductor wafer is supported exclusively below an imaginary central plane in the center between the front side and the rear side of the semiconductor wafer. The carrier is preferably used in the treatment of semiconductor wafers at temperatures of at least 200.degree. C.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.